THERMAL SCIENCE

International Scientific Journal

Pinzhong Chen

,

Zhongliang Pan

HYDROTHERMAL PERFORMANCE ANALYSIS AND MULTI-OBJECTIVE OPTIMIZATION OF MICRO-CHANNEL 3D-IC WITH ALTERNATING SECONDARY FLOW CHANNELS

ABSTRACT
Embedding micro-channels in a 3D-IC can alleviate heat dissipation problems. In this paper, micro-channel 3D-IC with alternating secondary flow channel was pro-posed and geometric parameters were optimized. Non-dominated Sorting Genetic Algorithm II was used for Pareto optimization. Optimization solutions (Rt_best, Pp_best, and ψbest) were selected in Pareto front. The optimization objective values of these solutions are all less than the corresponding values of conventional design. Based on Pareto front, a compromise solution for technique for order preference by similarity to an ideal solution was calculated. Compared with conventional design, the thermal resistance of Rt_best, pumping power of Pp_best, and chip uniformity index of ψbest are reduced by 10.2%, 3.4%, and 7.3%, respectively. Compared with conventional de-sign, the thermal resistance, pumping power, and chip uniformity index of compromise solution based on technique for order preference by similarity to an ideal solution are reduced by 10.0%, 1.0% and 7.1%, respectively. The results may help the development of optimization design of the micro-channel in 3D-IC.
KEYWORDS
3D-IC, microchannel, alternating secondary flow channel, Hydrothermal performance, multi-objective programming
PAPER SUBMITTED: 2024-10-05
PAPER REVISED: 2024-11-18
PAPER ACCEPTED: 2024-11-27
PUBLISHED ONLINE: 2025-01-09
DOI REFERENCE: https://doi.org/10.2298/TSCI241005282C
CITATION EXPORT: view in browser or download as text file
THERMAL SCIENCE YEAR 2025, VOLUME 29, ISSUE No. 4, PAGES [2659 - 2670]
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Hydrothermal performance analysis and multi-objective optimization of micro-channel 3D-IC with alternating secondary flow channels

© 2026 Society of Thermal Engineers of Serbia. Published by the Vinča Institute of Nuclear Sciences, National Institute of the Republic of Serbia, Belgrade, Serbia. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution-NonCommercial-NoDerivs 4.0 International licence