THERMAL SCIENCE

International Scientific Journal

Yanni Zhang

,

Yiman Han

,

Xin Zhao

,

Zhen Zhao

,

Jing Pang

APPLYING NUMERICAL CONTROL TO ANALYZE THE PULL-IN STABILITY OF MEMS SYSTEMS

ABSTRACT
The micro-electro-mechanical system is widely used for energy harvesting and thermal wind sensor, its efficiency and reliability depend upon the pull-in instability. This paper studies a micro-electro-mechanical system using He-Liu [34] formulation for finding its frequency-amplitude relationship. The system periodic motion, pull-in instability and pseudo-periodic motion are discussed. This paper offers a new window for security monitoring of the system reliable operation.
KEYWORDS
micro-electro-mechanical systems, pull-in instability, He's frequency formulation, dynamic characteristic
PAPER SUBMITTED: 2023-03-18
PAPER REVISED: 2023-08-01
PAPER ACCEPTED: 2023-08-06
PUBLISHED ONLINE: 2024-05-18
DOI REFERENCE: https://doi.org/10.2298/TSCI2403171Z
CITATION EXPORT: view in browser or download as text file
THERMAL SCIENCE YEAR 2024, VOLUME 28, ISSUE No. 3, PAGES [2171 - 2178]
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Applying numerical control to analyze the pull-in stability of MEMS systems

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